Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions
نویسندگان
چکیده
منابع مشابه
Quasi Monolithic Silicon Load Cell for Loads up to 1000 Insensitivity to Non-homogeneous Load Distributions
In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains an array of sensing elements to make the load cell insensitive to non-homogeneous load distributions resulting in higher accuracy. The load cell has been realized and tested. Measurement results show an accuracy of 0.2 % of full scale limited by...
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In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg. ANSYS simulations were used to determine the load cell dimensions and strain gauge positions. The load cell consists of two parts, which are bonded to each other using Low Temperature Silicon Direct Bonding processes (LTSDB). To isolate the membrane with the sensors from lateral displacements w...
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In this paper, the first silicon load cell is presented designed for measuring a load up to 1000 kg. A prototype has been realised. An improved cryogenic RIE process with high aspect ratio was developed for the fabrication of thin springs. Low temperature silicon direct bonding was used for the final assembly. The mechanical structure was tested using poly silicon strain gauges. Encapsulated re...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2000
ISSN: 0924-4247
DOI: 10.1016/s0924-4247(99)00265-4